Nanofabrication techniques for 100 nm-scale silicon metal oxide semiconductor field effect transistor
- 1 November 1991
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 9 (6) , 2851-2855
- https://doi.org/10.1116/1.585655
Abstract
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