Nanometer Positioning Characteristics of Closed Looped Differential Hydro-or Aerostatic Actuator
- 31 December 1983
- journal article
- Published by Elsevier in CIRP Annals
- Vol. 32 (1) , 287-289
- https://doi.org/10.1016/s0007-8506(07)63406-4
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Piezodriven 50-μm range stage with subnanometer resolutionReview of Scientific Instruments, 1978