Selective Epitaxial Deposition of Silicon
- 1 August 1962
- journal article
- letter
- Published by Springer Nature in Nature
- Vol. 195 (4840) , 485-486
- https://doi.org/10.1038/195485a0
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Epitaxial Silicon Films by the Hydrogen Reduction of SiCl[sub 4]Journal of the Electrochemical Society, 1961
- Growth of Single Crystal Silicon Overgrowths on Silicon SubstratesJournal of the Electrochemical Society, 1960
- Stabilization of Silicon Surfaces by Thermally Grown Oxides*Bell System Technical Journal, 1959