Microwave sputtering system for the fabrication of thin solid films
- 1 February 1982
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 53 (2) , 214-216
- https://doi.org/10.1063/1.1136929
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- Dispersive optical constants of amorphous Se1−xTex filmsJournal of Applied Physics, 1980
- Radial distribution of excited atoms in a new coaxial line type microwave cw discharge tubeJournal of Applied Physics, 1980