Diffraction from multilayer films with partially correlated interfacial roughness

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Abstract
The interfacial roughness in multilayer films is described by a model in which the parameters are directly related to those of microscopic growth processes. The height-height correlation function is extracted from this model. Stationary and nonstationary roughness are discussed. The diffuse intensity in diffraction from multilayer films that have various degrees of correlation in roughness between interfaces is calculated. The presence of perfect or partial interfacial roughness correlation can be distinguished unambiguously in the diffusely scattered intensity.