A new 2 MV single-ended ion accelerator for ion implantation
- 1 January 1985
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 6 (1) , 46-50
- https://doi.org/10.1016/0168-583x(85)90608-1
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- The Frankfurt PIG ion sourceNuclear Instruments and Methods in Physics Research, 1981
- Properties of a high current, long life lithium ion sourceNuclear Instruments and Methods, 1972
- The colutron, a zero deflection isotope separatorNuclear Instruments and Methods, 1964