Pulsed-laser deposition of smooth high-T c superconducting films using a synchronous velocity filter

24 April 1995

journal article
Published by AIP Publishing in Applied Physics Letters

Vol. 66 (17) , 2292-2294
https://doi.org/10.1063/1.113264

Abstract

Pulsed-laser deposition of smooth high-Tc superconducting films almost free from droplets and precipitates with the use of velocity filtration of plasma particles is reported. We have removed droplets from laser-induced plasma by using a shutter technique; a reduction of the droplet density by a factor of 105 has been achieved. We have applied the technique to the preparation of high quality YBa2Cu3O7−δ films on (100)-oriented SrTiO3, MgO, Y2O3-stabilized ZrO2 (YSZ) substrates and, furthermore, on (11̄02)-oriented sapphire covered with (100) sublayers of Si and (100) YSZ buffer layers.

Keywords

YTTRIUM OXIDES
BARIUM OXIDES
COPPER OXIDES
HIGH−TC SUPERCONDUCTORS
FILM GROWTH
PULSED LASERS
DEPOSITION
CRYSTAL DEFECTS
PRECIPITATES
DROPLETS
SURFACE STRUCTURE
ROUGHNESS

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