Anwendung der Neutronenaktivierungsanalyse zur Untersuchung von Konzentrationaprofilen in Silizium
- 1 January 1972
- journal article
- Published by Taylor & Francis in Isotopenpraxis Isotopes in Environmental and Health Studies
- Vol. 8 (2) , 41-47
- https://doi.org/10.1080/10256017208623015
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Arsenic Isoconcentration Diffusion Studies in SiliconJournal of Applied Physics, 1969
- Self-Diffusion in Intrinsic and Extrinsic SiliconJournal of Applied Physics, 1967
- Studies of anomalous diffusion of impurities in siliconSolid-State Electronics, 1966
- Aktivierungsanalytische Untersuchungen an hochreinem SiliciumAnalytical and Bioanalytical Chemistry, 1964
- Formation and Composition of Surface Layers and Solubility Limits of Phosphorus During Diffusion in SiliconJournal of the Electrochemical Society, 1964