Accelerated Dielectric Breakdown of Silicon Dioxide Films

• 1 January 1973
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 120  (10) , 1377
• https://doi.org/10.1149/1.2403266

Abstract

Keywords

• SILICON DIOXIDE
• DIOXIDE FILMS
• DIELECTRIC BREAKDOWN
• ACCELERATED DIELECTRIC
• BREAKDOWN OF SILICON