Single-mode optical waveguide fabricated by oxidization of selectively doped titanium porous silicon
- 8 June 1998
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 72 (23) , 2945-2947
- https://doi.org/10.1063/1.121502
Abstract
Metal-organic compound molecules were selectively doped into the larger pores of a two-layered porous silicon (PS) which had different pore sizes. PS with a graded pore-size distribution was area-selectively formed by utilizing a thin film mask. Titanium-organic compound molecules were doped into the larger pores and the PS was oxidized to form an optical waveguide. Single-mode transmission of 1.55 μm wavelength laser light was successfully observed.Keywords
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