A digital readout technique for capacitive sensor applications
- 1 August 1988
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Journal of Solid-State Circuits
- Vol. 23 (4) , 972-977
- https://doi.org/10.1109/4.348
Abstract
The difference between two capacitors is measured digitally using a charge redistribution technique incorporating a comparator, MOS switches, a successive approximation register, and a digital-to-analog converter. The technique is insensitive to comparator offset and parasitic capacitance, and the effect of MOS switch charge injection is measured and canceled. Extensive measurements have been made from test chips fabricated in 3- mu m CMOS technology. Detection of percent differences ofKeywords
This publication has 11 references indexed in Scilit:
- A switched-capacitor interface for intelligent capacitive transducersIEEE Transactions on Instrumentation and Measurement, 1986
- Random error effects in matched MOS capacitors and current sourcesIEEE Journal of Solid-State Circuits, 1984
- A precision measurement technique for residual polarization in integrated circuit capacitorsIEEE Electron Device Letters, 1984
- A Switched-Capacitor Digital Capacitance BridgeIEEE Transactions on Instrumentation and Measurement, 1984
- Random errors in MOS capacitorsIEEE Journal of Solid-State Circuits, 1982
- A batch-fabricated silicon capacitive pressure transducer with low temperature sensitivityIEEE Transactions on Electron Devices, 1982
- MicrodielectrometrySensors and Actuators, 1981
- A monolithic capacitive pressure sensor with pulse-period outputIEEE Transactions on Electron Devices, 1980
- Precision Capacitor Ratio Measurement Technique for Integrated Circuit Capacitor ArraysIEEE Transactions on Instrumentation and Measurement, 1979
- A Diode-Quad Bridge Circuit for Use with Capacitance TransducersReview of Scientific Instruments, 1973