Sputtered Dielectric Thin Films with High-Refractive-Index for Optical Waveguide

• 1 May 1977
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 16  (5) , 843-844
• https://doi.org/10.1143/jjap.16.843

Abstract

Keywords

• REFRACTIVE INDEX
• SPUTTERED DIELECTRIC
• HIGH REFRACTIVE
• OPTICAL
• WAVEGUIDE
• DIELECTRIC THIN FILMS