A CMOS compatible thermally excited silicon oxide beam resonator with aluminum mirror
- 9 December 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Performance of thermally excited resonatorsSensors and Actuators A: Physical, 1990
- Resonating microbridge mass flow sensorSensors and Actuators A: Physical, 1990
- Thermally excited silicon microactuatorsIEEE Transactions on Electron Devices, 1988