A low power integrated catalytic gas sensor
- 1 May 1993
- journal article
- Published by Elsevier in Sensors and Actuators B: Chemical
- Vol. 13 (1-3) , 155-158
- https://doi.org/10.1016/0925-4005(93)85349-f
Abstract
No abstract availableKeywords
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- A technique for the determination of stress in thin filmsJournal of Vacuum Science & Technology B, 1983
- Silicon nitride single-layer x-ray maskJournal of Vacuum Science and Technology, 1982