The Commercialization Of Engineered Diamond Technology
- 18 May 1988
- proceedings article
- Published by SPIE-Intl Soc Optical Eng
- Vol. 0877, 79-86
- https://doi.org/10.1117/12.943943
Abstract
Some of the commercial aspects of thin diamond films deposited by plasma enhanced chemical vapor deposition are reviewed. Diamond films deposited by the use of DC bias have been characterized by using a variety of techniques including Raman spectroscopy and scanning electron microscopy. The relationship between deposition conditions and film characteristics are discussed.Keywords
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