Projectile-energy dependence of compositional changes produced in sputtering of a dilute Si(Fe, W) alloy

This publication has 19 references indexed in Scilit:

• Mass and energy dependence of the equilibrium surface composition of sputtered tantalum oxide
  Applied Physics Letters, 1978
• Sputtering of PtSi
  Journal of Applied Physics, 1978
• Surface-layer composition changes in sputtered alloys and compounds
  Applied Physics Letters, 1977
• Auger study of preferred sputtering on binary alloy surfaces
  Surface Science, 1976
• Preferential oxygen sputtering from Nb2O5
  Thin Solid Films, 1976
• Influence of the altered layer on depth profiling measurements
  Applied Physics Letters, 1976
• Sputtering of the alloy systems AgAu, AuCu, and AgCu studied by Auger electron spectroscopy
  Nuclear Instruments and Methods, 1976
• Quantitative auger electron spectroscopy analysis of AgPd and NiPd alloys
  Surface Science, 1975
• Quantitative auger analysis of copper-nickel alloy surfaces after argon ion bombardment
  Surface Science, 1973
• The sputtering of oxides part i: a survey of the experimental results
  Radiation Effects, 1973