Influence of carbon on the enhanced oxygen loss in copper oxide films
- 25 March 1991
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 58 (12) , 1344-1346
- https://doi.org/10.1063/1.104305
Abstract
12C(α,α)12C, 16O(α,α)16O resonances and the 16O(3He,α)15O nuclear reaction in situ analysis have been employed to study the influence of carbon on the reduction of CuO to Cu2O. Significant oxygen loss from CuO starts in the presence of carbon at 250 °C. During in situ annealing of a CuO film, CO2 was detected by mass spectrometry. The combination of carbon and oxygen atoms to form CO2 at the carbon/copper oxide interface is the limiting step to the enhanced oxygen loss rate from CuO thin films.Keywords
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