Abstract
Arsenic segregation in passivation/insulation is a major problem in device applications. The extent of arsenic segregation is related to the intensity of photoluminescence observed when a treated surface is exposed to a laser beam. The relationship is then used to determine the kinetics of the arsenic segregation, which involves a solid‐solid reaction for oxygen extraction by gallium from . The results are applied to literature data. The kinetics determined indicate that the solid‐solid reaction could be elementary, at least with respect to the gallium atom concentration.

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