Integrated Zinc oxide-on-silicon tactile-sensor array

• 1 January 1985
• proceedings article
• Published by Institute of Electrical and Electronics Engineers (IEEE)
• https://doi.org/10.1109/iedm.1985.190911

Abstract

Keywords

• ZINC OXIDE
• SENSOR ARRAY
• TACTILE SENSOR
• INTEGRATED ZINC
• SILICON TACTILE
• OXIDE ON SILICON