Transverse transmission electron microscopy of sputtered NbN films
- 1 November 1986
- journal article
- research article
- Published by Springer Nature in Journal of Materials Science
- Vol. 21 (11) , 4097-4100
- https://doi.org/10.1007/bf00553474
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Application of NbN films to the development of very high field superconducting magnetsIEEE Transactions on Magnetics, 1985
- Magnetic penetration depths in superconducting NbN films prepared by reactive dc magnetron sputteringApplied Physics Letters, 1984
- Dimensional effects on current and field properties in NbN filmsIEEE Transactions on Magnetics, 1981
- Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatingsJournal of Vacuum Science and Technology, 1974
- Electronmicroscopic evidence for a columnar-void-type structure in sputtered NbN filmsJournal of Applied Physics, 1974