Dissolution inhibitors and modulators for chemical amplification resists.

• 1 January 1990
• journal article
• Published by Technical Association of Photopolymers, Japan in Journal of Photopolymer Science and Technology
• Vol. 3  (3) , 347-354
• https://doi.org/10.2494/photopolymer.3.347

Abstract

Keywords

• DISSOLUTION INHIBITORS
• CHEMICAL AMPLIFICATION RESISTS
• INHIBITORS AND MODULATORS
• MODULATORS FOR CHEMICAL