Sputtering of flat glass surfaces with noble gas ions
- 16 May 1978
- journal article
- research article
- Published by Wiley in Physica Status Solidi (a)
- Vol. 47 (1) , 79-84
- https://doi.org/10.1002/pssa.2210470108
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Abtragraten und spezifische Energieverluste von 5,6 keV-Edelgasionen an KieselglasZeitschrift für Naturforschung A, 1972