Self-modulating ion gauge
- 1 January 1980
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science and Technology
- Vol. 17 (1) , 355-356
- https://doi.org/10.1116/1.570386
Abstract
A Bayard–Alpert ionization pressure gauge has been modified by shortening the collector wire thereby reducing the x‐ray limit from ∠2.5×10−11 to ∠0.6×10−11 Torr. In addition it has proven possible to modulate this gauge and thus make an i n s i t u determination of the x‐ray limit without the introduction of a modulation electrode. Thus a self‐modulating, low x‐ray limit ion gauge has been developed at reasonably low cost and seems particularly suited to the ISABELLE ultrahigh vacuum system.Keywords
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