ELUCIDATION OF DISLOCATION CORE STRUCTURES IN SILICON BY HIGH RESOLUTION ELECTRON MICROSCOPY
Open Access
- 1 September 1983
- journal article
- Published by EDP Sciences in Le Journal de Physique Colloques
- Vol. 44 (C4) , C4-3
- https://doi.org/10.1051/jphyscol:1983401
Abstract
'Atomic images of silicon are described and it is shown that current HREMs are not capable of the resolution required for resolving single columns of atoms. The sensitivity of such images to changes in thickness and defocus is illustrated. Conditions are described for obtaining images, at restricted resolution, which may be interpreted directly in terms of the crystal structure. The elucidation of 30° core structures in deformed silicon by comparing experimental and computed images i s discussed, along with some observations of undissociated 60° dislocations. Finally, future prospects for core structure studies by HEM are outlinedKeywords
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