Monte Carlo low pressure deposition profile simulations

• 1 May 1991
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 9  (3) , 1083-1087
• https://doi.org/10.1116/1.577580

Abstract

Keywords

• MODELS
• EVOLUTION
• MONTE CARLO
• DIRECT DEPOSITION
• ALGORITHM IS USED
• ALGORITHMS
• CVD
• COEFFICIENT