Integration of Nano-Photonic Devices for CMOS Chip-to-Chip Optical I/O
- 1 January 2010
- proceedings article
- Published by Optica Publishing Group
Abstract
A photonic CMOS process enables integration of electro-optical polymer modulators, silicon nitride waveguides and polycrystalline germanium photodetectors in a CMOS logic process. CMOS compatible ring resonator modulators and Ge detectors both demonstrate 40 Gb/s performance.Keywords
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