Thin Film ZnO-MOS Transducer with Virtually DC Response

• 1 January 1980
• proceedings article
• Published by Institute of Electrical and Electronics Engineers (IEEE)
• p. 945-948
• https://doi.org/10.1109/ultsym.1980.197536

Abstract

Keywords

• TRANSISTORS
• PIEZOELECTRIC FILMS
• ZINC OXIDE
• FETS
• PIEZOELECTRIC TRANSDUCERS
• CAPACITIVE SENSORS
• MOSFETS
• SILICON COMPOUNDS
• ACOUSTIC TRANSDUCERS
• ULTRASONIC TRANSDUCERS