Charge neutralisation in the PI9000 series implanters

• 1 April 1991
• journal article
• Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
• Vol. 55  (1) , 413-416
• https://doi.org/10.1016/0168-583x(91)96203-w

Abstract

Keywords

• CHARGE NEUTRALISATION
• PI9000 SERIES IMPLANTERS
• NEUTRALISATION IN THE PI9000