Confocal laser microscope for submicron structure measurement
- 1 December 1986
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 5 (1-4) , 573-580
- https://doi.org/10.1016/0167-9317(86)90092-4
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Optical fluorescence microscopy in three dimensions: microtomoscopyJournal of Microscopy, 1985
- Mechanical scan system for microscopic applicationsReview of Scientific Instruments, 1983