A Parametric Study of Spin Coating over Topography
- 4 April 1998
- journal article
- research article
- Published by American Chemical Society (ACS) in Industrial & Engineering Chemistry Research
- Vol. 37 (6) , 2223-2227
- https://doi.org/10.1021/ie970619i
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- Influence of solvent and molecular weight on thickness and surface topography of spin‐coated polymer filmsPolymer Engineering & Science, 1990
- Properties of Thin Polyimide FilmsJournal of the Electrochemical Society, 1980
- Flow of a Viscous Liquid on a Rotating DiskJournal of Applied Physics, 1958