Development of a high resolution sensor for surface roughness.

• 1 January 1987
• journal article
• Published by Japan Society for Precision Engineering in Journal of the Japan Society for Precision Engineering
• Vol. 53  (2) , 328-333
• https://doi.org/10.2493/jjspe.53.328

Abstract

Keywords

• SURFACE ROUGHNESS
• RESOLUTION SENSOR
• HIGH RESOLUTION
• DEVELOPMENT
• SENSOR FOR SURFACE