Morphological and structural features of Cu seed cones

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Abstract
Morphologies and structures of surface cones formed on polycrystalline Cu targets seeded with Mo were surveyed by means of high-resolution electron microscopy. The sputtering of the target with a focused Ar+-ion beam generated Cu cones having diversified configurations and crystalline states, obviously reflecting an intricate mechanism of cone evolution. Some of the cones observed were characterized by an amorphouslike structure, commonly grown at the apex areas, and Mo was never detected from coned areas. These findings strongly suggest that the role of Mo seeds was to nucleate cones, and that the direct supply of sputtered Cu atoms to the cone nucleation sites interplayed with the ion-etching process so as to develop the nucleated cones.

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