Negative-ion desorption from insulators by electron excitation of core levels
- 8 July 1991
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review Letters
- Vol. 67 (2) , 232-235
- https://doi.org/10.1103/physrevlett.67.232
Abstract
We have observed the desorption of and ions during the electron bombardment of , and have determined ion yields and kinetic-energy distributions at electron energies >100 eV. The threshold energy for the yield corresponds to the excitation of Si-L-shell core levels. We propose that multielectron excitations cause the ejection of positive ions or neutral atoms from the surface, and that these species can capture electrons in the surface region to form negative ions. Alternatively, the creation of superexcited electronic states of an surface complex may lead to the ejection of .
Keywords
This publication has 22 references indexed in Scilit:
- Multiply charged ions from electron bombardment ofPhysical Review B, 1990
- Electron stimulated desorption effects in secondary ion emission from BF+2 implanted SiO2Journal of Vacuum Science & Technology A, 1990
- Build-up and annealing of damage induced by ion and electron beams at SiO2 surfaces: An AES studyApplied Surface Science, 1989
- The surfaces of metal oxidesReports on Progress in Physics, 1985
- Mechanisms of electron stimulated desorption from soda–silica glass surfacesJournal of Vacuum Science & Technology A, 1984
- General model of sodium desorption and diffusion during electron bombardment of glassJournal of Vacuum Science and Technology, 1982
- Studies of the desorption mechanism of O− by electron impact from oxygen covered metal surfacesSurface Science, 1982
- Ion Desorption by Core-Hole Auger DecayPhysical Review Letters, 1978
- An Auger analysis of the SiO2-Si interfaceJournal of Applied Physics, 1976
- Phase separation in silicon oxides as seen by Auger electron spectroscopyApplied Physics Letters, 1975