MASS SELECTED ION BEAM DEPOSITION: A TOOL FOR PARAMETRIC GROWTH STUDIES, PROCESS DEVELOPMENT AND FABRICATION OF DIAMONDLIKE FILMS
- 1 January 1988
- journal article
- Published by Taylor & Francis in Advanced Materials and Manufacturing Processes
- Vol. 3 (2) , 157-194
- https://doi.org/10.1080/10426918808953202
Abstract
No abstract availableKeywords
This publication has 68 references indexed in Scilit:
- Electron spin resonance investigation of ion beam modified amorphous hydrogenated (diamondlike) carbonJournal of Applied Physics, 1987
- Comparison of diamondlike coatings deposited with C+ and various hydrocarbon ion beamsApplied Physics Letters, 1987
- Empirical categorization and naming of “diamond-like” carbon filmsThin Solid Films, 1986
- Density measurements of diamond-like coatings using a low energy acceleratorThin Solid Films, 1986
- Coating of pellet pressing tool with 12C by ion beam depositionNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1985
- Diamond: Some interesting physical propertiesJournal of Chemical Education, 1984
- Properties and applications of diamondlike carbon filmsJournal of Vacuum Science & Technology A, 1984
- Physics of Ion Plating and Ion Beam DepositionJournal of Vacuum Science and Technology, 1973
- Ion-Beam Deposition of Thin Films of Diamondlike CarbonJournal of Applied Physics, 1971
- Carbon: A New Crystalline PhaseScience, 1963