Kinetics of the Thermal Oxidation of Silicon in O 2 / N 2 Mixtures at 1200°C
- 1 April 1975
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 122 (4) , 579-581
- https://doi.org/10.1149/1.2134264
Abstract
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