Performance evaluation of micromachined mirror arrays for adaptive optics

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Abstract
The performance of different MEMS mirrors from Boston University, MEMS Optical LLC, University of Colorado and OKO Technologies was studied in respect to an application in a model-free adaptive optics system. The frequency response characteristic was determined in a simple laser beam focusing set-up. Closed-loop adaptation experiments were performed using a VLSI controller system implementing a stochastic parallel gradient descent optimization algorithm. The system behavior using different MEMS mirror types, esp. adaptation speed, was compared.

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