Limits to the hardness testing of films thinner than 1 μm
- 1 April 1987
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 148 (2) , 171-180
- https://doi.org/10.1016/0040-6090(87)90155-6
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
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