Inhomogeneous indium tin oxide films prepared by sputtering with multiple targets
- 1 December 1983
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 110 (4) , L129-L132
- https://doi.org/10.1016/0040-6090(83)90511-4
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- Tin-doped In2O3 films deposited by r.f. sputteringThin Solid Films, 1983
- Deposition of conducting and transparent thin films of indium tin oxide by reactive ion platingThin Solid Films, 1981
- Preparation and properties of reactively co-sputtered transparent conducting filmsThin Solid Films, 1975