Hexagonal AlN films grown on nominal and off-axis Si(001) substrates
- 25 July 2001
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 230 (3-4) , 426-431
- https://doi.org/10.1016/s0022-0248(01)01241-6
Abstract
No abstract availableKeywords
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