Fluctuation-Free Electron Emission from Non-Formed Metal-Insulator-Metal (MIM) Cathodes Fabricated by Low Current Anodic Oxidation
- 1 November 1993
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 32 (11B) , L1695
- https://doi.org/10.1143/jjap.32.l1695
Abstract
Fluctuation-free electron emission is obtained from MIM (Al-Al2O3-Au) cathodes. The Al2O3 layer is fabricated by anodic oxidation with a reduced electrolysis current density, i.e., a reduced oxidation rate. The slow oxidation process improves the insulating effect of the Al2O3 layer, and enables the MIM cathodes to operate in the non-formed state. The fluctuation-free emission is reproducible when the diode voltage is cut off instantaneously. With a thin Al2O3 layer, the diode voltage reguired for the cathode operation is reduced to values slightly above the work function of the top electrode.Keywords
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