Crystalline properties of rf-sputtered ZnO film on gold film on fused quartz
- 15 August 1984
- journal article
- conference paper
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 56 (4) , 1133-1135
- https://doi.org/10.1063/1.334086
Abstract
The effect of the crystalline properties of gold film on those of ZnO film was investigated in detail for a ZnO/gold/fused quartz structure. The investigations were done using x-ray diffraction and a rocking curve method. It was found that the crystalline properties of rf-sputtered ZnO films were strongly dependent on those of gold films. Transducer efficiency was also determined for this structure. It was found that the ZnO/gold/fused quartz structure had a high transducer efficiency, if the ZnO film was fabricated on the gold film whose σ for the (111) rocking curve was less than 3°.This publication has 2 references indexed in Scilit:
- Studies of the optimum conditions for growth of rf-sputtered ZnO filmsJournal of Applied Physics, 1975
- Growth of alkali halide crystals from the vapor phase and from solution onto substrates of micaActa Crystallographica, 1951