Low‐temperature adsorption of oxygen on Si(111)

• 1 May 1990
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 8  (3) , 2743-2746
• https://doi.org/10.1116/1.576660

Abstract

Keywords

• LOW TEMPERATURE ADSORPTION
• OXYGEN ON SI
• ADSORPTION OF OXYGEN