Fatigue and Refreshment of (Pb, La)TiO3 Thin Films by Multiple Cathode Sputtering
- 1 September 1994
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 33 (9S)
- https://doi.org/10.1143/jjap.33.5240
Abstract
The ferroelectric fatigue and refreshment of (Pb, La)TiO3 thin films by multiple cathode rf-magnetron sputtering were investigated. The remanent polarization of the fatigued (Pb, La)TiO3 thin films increased after the application of the DC bias voltage of -20 V for 104 s. By heat treatment of the fatigued films at 400° C for 1 h, the coercive field decreased, and squareness of the loop was improved. These behaviors were discussed from the viewpoint of the behavior of defect dipoles.Keywords
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