Antireflection-coated diffractive optical elements fabricated by thin-film deposition
- 1 November 1994
- journal article
- Published by SPIE-Intl Soc Optical Eng in Optical Engineering
- Vol. 33 (11) , 3537-3546
- https://doi.org/10.1117/12.179893
Abstract
The use of thin-film deposition in the fabrication of antireflection- coated diffractive optical elements is discussed. The antireflection coatings for these diffractive elements are optimized on the basis of an angular spectrum approach and the method of characteristic matrices. A minimum reflectivity as low as 1*10-4 is realized using in situ controlled multilayers of TiO2 and SiO2. The blazed profile of the diffractive optical elements is approximated by a stepped profile with up to 32 phase levels. The highest measured diffraction efficiency for 32-level Fresnel zone lenses was 97%Keywords
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