The liga process. Micromachining techniques.

• 1 January 1994
• journal article
• Published by Technical Association of Photopolymers, Japan in Journal of Photopolymer Science and Technology
• Vol. 7  (1) , 1-15
• https://doi.org/10.2494/photopolymer.7.1

Abstract

Keywords

• LIGA PROCESS
• MICROMACHINING TECHNIQUES