Influence of Electrolyte Concentration on the Anodization and Breakdown Characteristics of Ta2 O 5 Films

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Abstract
Voltage‐time anodization curves, breakdown voltages, and I‐V characteristics have been measured in films grown in oxalic and phosphoric acid electrolytes. The results have been interpreted in terms of a simple avalanche model for the electronic current. The origin of the primary electrons of the avalanche is attributed to the electrolyte species incorporated into the oxide during the anodization process.