New Applications of Porous Silicon

• 1 March 1996
• journal article
• Published by Trans Tech Publications, Ltd. in Defect and Diffusion Forum
• Vol. 134-135, 15-24
• https://doi.org/10.4028/www.scientific.net/ddf.134-135.15

Abstract

Keywords

• MICRO MACHINING
• POROUS SILICON (PS)
• SILICON SENSORS