Thermodynamic and Experimental Analysis of Chemical Vapor Deposition of Alumina from AlCl3 ‐ H 2 ‐ CO 2 Gas Phase Mixtures
- 1 June 1982
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 129 (6) , 1367-1372
- https://doi.org/10.1149/1.2124152