Investigation of chromium, cobalt, and nickel-implantation in silicon using Auger electron spectrometry, secondary ion mass spectrometry, Rutherford backscattering spectrometry, and Monte Carlo simulation
- 1 August 1991
- journal article
- research article
- Published by American Chemical Society (ACS) in Analytical Chemistry
- Vol. 63 (15) , 1562-1570
- https://doi.org/10.1021/ac00015a012
Abstract
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