Film growth processes from glow-discharge plasma. Amorphous Si and Si-based alloys.

• 1 January 1988
• journal article
• Published by The Vacuum Society of Japan in SHINKU
• Vol. 31  (3) , 188-194
• https://doi.org/10.3131/jvsj.31.188

Abstract

Keywords

• FILM GROWTH
• AMORPHOUS SI
• SI BASED
• GLOW DISCHARGE
• ALLOYS
• GROWTH PROCESSES